Multilayered piezoelectric/electrostrictive ceramic actuator

ABSTRACT

The present invention relates a manufacturing method of a multilayered piezoelectric/electrostrictive ceramic actuator by sintering process at low temperature and a multilayered piezoelectric/electrostrictive ceramic actuator manufactured by the method. The present invention as above makes effect feasible of high quality image and high speed printing as large displacement and high speed actuating is feasible because it can get great displacement and driving speed even with small variation in driving voltage because of piezoelectric/electrostrictive layer and upper electrode altenatingly heaped to multilayer.

BACKGROUND OF THE INVENTION

[0001] 1. Field of the Invention

[0002] The present invention relates to a manufacturing method of a piezoelectric/electrostrictive ceramic actuator and a piezoelectric/electrostrictive ceramic actuator manufactured by the method. In particular, the present invention relates a manufacturing method of a piezoelectric/electrostrictive ceramic actuator multilayered of suprastructure and piezoelectric/electrostrictive layer and the piezoelectric/electrostrictive ceramic actuator manufactured by the method.

[0003] 2. Description of the Prior Art

[0004] Actuator should quickly move with sufficient displacement if to deliver the ink drops in specific size and speed from ink jet printer head.

[0005] It is general practice that ink jet printer head actuator is comprising of a vibration plate bound with infrastructure, a lower electrode formed on the vibration plate, a piezoelectric/electrostrictive layer formed on the lower electrode, and an upper electrode formed on the piezoelectric/electrostrictive layer.

[0006] For actuator so comprised, if electricity is supplied to the upper and lower electrodes, the piezoelectric/electrostrictive layer placed between the electrodes vibrates according to electricity with recycling of deformation and restoration.

[0007] Usaully used piezoelectric/electrostrictive ceramic actuator structure is illustrated in FIG. 1.

[0008] It is general practice in actuator shown in FIG. 1 to form a lower electrode (14) of platinum etc. on the vibration plate (12) and a chamber plate (10) made of zirconia etc., to form a piezoelectric/electrostrictive layer (16) on the lower electrode (14) using ceramic oxide powder which requires heat treatment at high temperature as it has been prepared by ordinarily used solid phase process, and to form an upper electrode (18) of silver etc. on the piezoelectric/electrostrictive layer (16).

[0009] For such actuators, only a few materials endurable in heat treatment above 1000° C. can be used as a material of a vibration plate or a chamber plate because a piezoelectric/electrostrictive layer is formed of ceramic oxide powder requiring a heat treatment above 1000° C. So there is a disadvantage that sorts of material usable for the vibration plate or the chamber plate are limited.

[0010] And voltage above a certain value should be applied to exert proper displacement because it is formed of one layer. Whence voltage that shall be supplied for actuator to exert the displacement cannot but be heightened, because particle size of ceramic oxide powder prepared by solid phase process is relatively large to 0.2-2 μm so that the piezoelectric/electrostrictive layer formed is 20-30 μm thick.piezoelectric/electrostrictive layer 20-30 μm thick.

[0011] The driving voltage of piezoelectric/electrostrictive ceramic actuator for use in ink jet head is dependent upon properties of structure substance comprising the actuator, including actuator thickness, piezoelectric/electrostrictive material properties, vibration plate characteristics etc. and is determined within range that can get sufficient displacement and speed. Such a driving voltage of the piezoelectric/electrostrictive ceramic actuator for ink jet head is generally determined within range near 20-30 V.

[0012] Greater driving speed and displacement is required for ink jet printer head to function as a high performance printer head. But a method ordinarily used to get greater driving speed and displacement is to increase the drive voltage in which case the drive circuit manufacture unit price is heightened and there is another problem that bad product can occur because it should be under condition to endure higher voltage in process.

SUMMARY OF THE INVENTION

[0013] The purpose of the present invention to solve the problem is to provide a manufacturing method of a piezoelectric/electrostrictive ceramic actuator capable of high speed and large displacement vibration by manufacturing a multilayered piezoelectric/electrostrictive ceramic actuator using ceramic paste feasible of low temperature formation of piezoelectric/electrostrictive layer.

[0014] The invention to accomplish the purpose features a manufacturing method of a multilayered piezoelectric/electrostrictive ceramic actuator by sintering process at low temperature, the method comprising the steps of: providing a metal vibration plate; forming a piezoelectric/electrostrictive layer on the vibration plate using ceramic paste prepared by mixing ultrafine ceramic oxide powder below 5 μm of particle size made by nonexplosive oxidative-reductive combustion reaction at relatively low temperature of 100-500° C., having basic composition elements of lead and titanium, and ceramic sol solution of same or similar composition with the ultrafine ceramic oxide powder, prepared on the base of water or organic solvent; thermally treating the piezoelectric/electrostrictive layer at 100-800° C.; forming an upper electrode on the piezoelectric/electrostrictive layer; and recycling the steps of forming a piezoelectric/electrostrictive layer on the vibration plate, thermally treating the the layer, and forming an upper electrode on the layer, thereby multilayered piezoelectric/electrostrictive layer and upper electrode are formed.

[0015] And the invention features a manufacturing method of a multilayered piezoelectric/electrostrictive ceramic actuator by sintering process at low temperature, the method comprising the steps of: providing a vibration plate; forming a lower electrode on the vibration plate; forming a piezoelectric/electrostrictive layer on the lower electrode top using ceramic paste prepared by mixing ultrafine ceramic oxide powder below 5 μm of particle size made by nonexplosive oxidative-reductive combustion reaction at relatively low temperature of 100-500° C., having basic composition elements of lead and titanium, and ceramic sol solution of same or similar composition with the ultrafine ceramic oxide powder, prepared on the base of water or organic solvent; thermally treating the piezoelectric/electrostrictive layer at 100-800° C.; forming an upper electrode on the piezoelectric/electrostrictive layer; and recycling the steps of forming a piezoelectric/electrostrictive layer on the vibration plate, thermally treating the the layer, and forming an upper electrode on the layer, thereby multilayered piezoelectric/electrostrictive layer and upper electrode are formed.

[0016] And the invention features a multilayered piezoelectric/electrostrictive ceramic actuator manufactured by sintering process at low temperature, the actuator comprising: a metal vibration plate; a piezoelectric/electrostrictive layer on the vibration plate using ceramic paste prepared by mixing ultrafine ceramic oxide powder below 5 μm of particle size made by nonexplosive oxidative-reductive combustion reaction at relatively low temperature of 100-500° C., having basic composition elements of lead and titanium, and ceramic sol solution of same or similar composition with the ultrafine ceramic oxide powder, prepared on the base of water or organic solvent; and an upper electrode formed on the piezoelectric/electrostrictive layer, wherein a multilayer structure is formed by forming the piezoelectric/electrostrictive layers and the upper electrodes alternatively each other.

[0017] And the invention features a multilayered piezoelectric/electrostrictive ceramic actuator manufactured by sintering process at low temperature, the actuator comprising: a vibration plate; a lower electrode formed on the vibration plate; a piezoelectric/electrostrictive layer on the lower electrode using ceramic paste prepared by mixing ultrafine ceramic oxide powder below 5 μm of particle size made by nonexplosive oxidative-reductive combustion reaction at relatively low temperature of 100-500° C., having basic composition elements of lead and titanium, and ceramic sol solution of same or similar composition with the ultrafine ceramic oxide powder, prepared on the base of water or organic solvent; and an upper electrode formed on the piezoelectric/electrostrictive layer, wherein a multilayer structure is formed by forming the piezoelectric/electrostrictive layers and the upper electrodes alternatively each other.

BRIEF DESCRIPTION OF DRAWINGS

[0018]FIG. 1 is a cross sectional view roughly showing a conventional piezoelectric/electrostrictive ceramic actuator.

[0019]FIG. 2 is a cross sectional view roughly showing a example of a multilayered piezoelectric/electrostrictive ceramic actuator according to the present invention.

DETAILED DESCRIPTION

[0020] The invention is explained in detail as follows.

[0021] Metal, ceramic or resinous polymeric organic compound may be used as actuator vibration plate.

[0022] Various traditional alloys can be used as for the metal among which it is particularly preferable to use stainless steel (SUS) or nickel.

[0023] It is preferable to use alumina (Al₂O₃), zirconia (ZrO₂), silicon (Si), silicon carbide (SiC), silicon nitride (Si₃N₄), silicon oxide (SiO₂) or glass series as for the ceramic.

[0024] And it is preferable to use polyester, polyimide, polyethyleneimide or Teflon series as for the resinous polymeric organic compound.

[0025] There is no need to form a separate lower electrode if metal is used as a vibration plate because metal itself is conductive while a separate lower electrode must be formed if ceramic or resinous polymeric organic compound is used for a vibration plate.

[0026] Whence a lower electrode is formed by a method of vacuum evaporation, sputtering or screen printing etc. using the materials of gold, silver, aluminum, nickel, platinum etc.

[0027] The lower electrode may be formed on the whole vibration plate, or only necessary part, using mask.

[0028] A piezoelectric/electrostrictive layer is formed on the metal vibration plate, or on the ceramic or the resinous polymeric organic compound vibration plate where the lower electrode has been formed.

[0029] Whence piezoelectric/electrostrictive ceramic paste capable of heat treatment at low temperature is used for the amterial of the piezoelectric/electrostrictive layer.

[0030] The piezoelectric/electrostrictive ceramic paste is prepared by mixing ceramic oxide powder with a ceramic sol solution compatible with the powder and of same or similar composition with the powder.

[0031] As for the ceramic oxide powder, because it is more effective to use finer powder to secure system feasible of low temperature forming considering the powder reactivity itself, it is manufactured by the steps : sufficiently dissolving or uniformly dispersing the raw material of constituent ceramic elements in solvent or dispersant to make a solution or a dispersion mixture containing the constituent ceramic elements; adding, into the solution or the dispersion mixture containing the constituent ceramic elements, citric acid in no less than the required amount to give rise to oxidative-reductive combustion reaction with an anion of the ceramic constituent ceramic element so as to make a mixed solution; and thermally treating the mixed liquid at 100-500° C. But it may additionally further comprises a step of conducting additional thermal treatment at 700-900° C. to increase crystallinity.

[0032] As for the raw material containing the constituent ceramic elements, use is made of from among oxide, carbonate, nitrate etc. of constituent ceramic element, its salt with organics or inorganics, or constituent ceramic elements complex.

[0033] As for the constituent ceramic element, it is preferable to use a piezoelectric/electrostrictive ceramic element comprising lead (Pb) and titanium (Ti) as basic constituent elements.

[0034] Especially as for the constituent ceramic element, it is preferable to use that composed of elements including lead (Pb), zirconium (Zr) and titanium (Ti), or lead (Pb), zirconium (Zr), titanium (Ti)/lead (Pb), magnesium (Mg), niobium (Nb).

[0035] As for the solvent or the dispersant to dissolve or disperse the raw material of constituent ceramic elements, one or more are selected to use from among water and organic solvents that can dissolve or disperse the raw material containing the constituent ceramic elements. As for the organic solvents, mainly acetic acid, dimethyl formamide, methoxyethanol, alcohols, glycols etc. are used.

[0036] As for the combustion aid, citric acid is used, which is an organic compound that can give rise to combustion reaction. In the conventional method, the citric acid has been used not as a combustion aid but a complexing agent in order to give reaction uniformity and has bee used in process such as Pechini process, where speed-controlled combustion reaction can be induced using citric acid's flammability and complex formation effect.

[0037] A mixture is made by adding citric acid into a solution or a dispersed mixture where constituent ceramic elements are dissolved or dispersed. The quantity of the citric acid added shall not be less than the necessary amount to give rise to oxidative-reductive combustion reaction with the anion of the constituent ceramic element. Reaction speed can be controlled by the quantity of citric acid added.

[0038] The mixture made by the addition of the citric acid is thermally treated at 100-500° C. Though the crystallinity of the ceramic phase increases as the temperature for thermal treatment, the citric acid combustion reaction may start enough if only temperature for thermal treatment is over 100° C. And though reaction can arise even if the temperature for thermal treatment is above 500° C., thermally treating above that temperature is meaningless when comparing with the conventional method.

[0039] More preferably it shall be thermally treated at 150-300° C. which is a temperature range can secure suitably the crystallinity of the ceramic phase although it is considerably low temperature range for a thermal treatment.

[0040] If the mixture is thermally treated to vaporize the solvent or the dispersant, the added citric acid acts as a reductive combustion aid and is removed giving rise to nonexplosive oxidative-reductive combustion reaction with the anion of constituent ceramic element, when the ceramic oxide is formed without scattering out by virtue of reaction heat generated at this time.

[0041] And in the reaction, components other than the constituent ceramic element are removed during sufficient time of combustion reaction so that the ultrafine ceramic oxide powder of pure type without impurity is obtained.

[0042] The particle size of the ultrafine ceramic oxide powder obtained by the method is below 1 μm, and is specifically 0.01-0.1 μm so extremely fine with uniform powder particle diameter distribution. The primary particles of which powder exist as independent bodies or as a soft aggregate type, and are in completely burnt ceramic phase so that the weight does not decrease even by additional thermal treatment.

[0043] And because the powder has excellent surface reactivity so that forming is feasible even only with a thermal treatment at low temperature, the degree of freedom for a vibration plate is high and diverse methods of printing and coating can be applied.

[0044] But it may additionally comprises a step of conducting additional thermal treatment of the obtained ultrafine ceramic oxide powder at 700-900° C. to increase the crystallinity of the powder produced.

[0045] The ceramic paste is prepared by mixing the ceramic oxide powder produced and the ceramic sol solution compatible with the powder and of same or similar composition with the powder.

[0046] Whence it is advisable to use PZT, PMN or their solid solution (PZT-PMN) complex oxides as for the ultrafine ceramic oxide powder.

[0047] And the ceramic oxide powder may additionally comprise one or more components among nickel (Ni), lanthanum (La), barium (Ba), zinc (Zn), lithium (Li), cobalt (Co), cadmium (Cd), cerium (Ce), chromium (Cr), antimony (Sb), iron (Fe), yttrium (Y), tantalum (Ta), tungsten (W), strontium (Sr), calcium (Ca), bismuth (Bi), tin (Sn) and manganese (Mn).

[0048] The ceramic sol solution is made on a base of water or organic solvent where ceramic composition element is then dissolved. While a variety of organic solvents may be used as for the base, it is preferable to use acetic acid, dimethyl formamide, methoxyethanol, alcohols, or glycols.

[0049] As for the ceramic composition elements used in preparing the ceramic sol solution it is preferable to use a ceramic composition comprising the component elements including lead (Pb), zirconium (Zr) and titanium (Ti) . And it is preferable that the concentration of the ceramic sol solution is 0.1-5 μM.

[0050] It is preferable that the content of the ceramic sol solution is 1-200 parts by weight of the ceramic oxide powder when mixing these two materials because the viscosity of a mixture will be too low as ceramic oxide powder is overdiluted if the content of the ceramic sol is above 200 parts by weight and the viscosity will be too high as the content of the ceramic oxide powder is too big if the content of the ceramic sol is below 1 part by weight.

[0051] Thus if these two systems of ceramic oxide powder and ceramic sol solution are mixed, liquid phase ceramic sol uniformly coats the solid phase ceramic oxide powder surface while linking the ceramic oxide powder particles so as to effectively fill the voids between powder particles.

[0052] Then ceramic oxide powder particle of ceramic specific properties in powder-sol mixture formed retains suitable fluidity surrounded by ceramic sol of same or similar composition with the powder while ceramic sol acts as reaction medium on the ceramic oxide powder surface so that powder surface reactivity is improved.

[0053] And afterwards when the mixture would contact with other organic compound, organic material component contained in sol solution enables the mixture to secure the contact interface stability to be donated with dispersibility and homogeneity.

[0054] For system like this, because sol experiences thermal decomposition to be converted to same or similar composition with ceramic oxide powder, the linkability between particles in a ceramic system is improved even at low temperature.

[0055] Organic solvent for material property control may be added in order to secure fluidity necessary for forming and stability of mixture of ceramic oxide powder and ceramic sol solution. A variety of materials may be used as for organic solvent for material property control but it is preferable to use alcohols or glycols such as ethanol, polyvinyl alcohol, glycerol, terpineol, polyethylene glycol.

[0056] It is preferable to take quantity of the organic solvent for material property control as 1-100 parts by weight of ceramic oxide powder when the solvent is added in the mixture of ceramic oxide powder and ceramic sol because there will be no addition effect of organic solvent for material property control if the solvent is added less than 1 part by weight while the mixture will be overdiluted not to retain viscosity so as to be deteriorated of formability when forming if the solvent is added above 100 parts by weight.

[0057] It is particularly preferable to add the organic solvent for material property control in 10-40 parts by weight of ceramic oxide powder within the addition range the organic solvent addition effect can be exhibited suitably maintaining the mixture viscosity.

[0058] And small quantity of organic material may also be added to improve homogeneity and dispersibility of eventual mixture of the mixture of ceramic oxide powder and ceramic sol solution added of the solvent for property control. It is preferable to use long chain alcohols or polar organic solvents as for the organic material added.

[0059] It is preferable to use pentanol or hexanol among long chain alcohols, and, it is preferable to use acetyl acetone or methoxyethanol as polar organic solvent.

[0060] It is preferable to add the final organic material 1-100 parts by weight of ceramic oxide powder because there will be no addition effect of the organic material if it is added less than 1 part by weight while the eventual mixture will be overdiluted not to retain viscosity so as to be deteriorated of formability when forming if it is added above 100 parts by weight.

[0061] It is particularly preferable to add the final organic material 10-40 parts by weight of ceramic oxide powder within which addition range its addition effect can be exhibited suitably maintaining the mixture viscosity.

[0062] One piezoelectric/electrostrictive layer is formed by various thick layer and thin layer formation methods such as sol-gel method, screen printing method, forming method, coating method using the piezoelectric/electrostrictive ceramic paste prepared by the method and is thermally treated 100-800° C. according to substrate material property and sort of additive.

[0063] Whence single piezoelectric/electrostrictive layer thickness may be adjusted by heat treatment condition or requirement but it is preferable to form it 0.1-10 μm thick and is specifically preferable to form it 1-6 μm thick.

[0064] While it has been unable to form thin piezoelectric/electrostrictive layer when using conventional ceramic oxide powder because ceramic oxide powder particle size was large, so thin a piezoelectric/electrostrictive layer can be formed when using ceramic oxide powder of the present invention because powder particle has fine size.

[0065] An upper electrode is formed on the piezoelectric/electrostrictive layer. As for the upper electrode, gold, silver, aluminum, nickel, platinum etc. are formed by various thick and thin layer formation methods of evaporation, sputtering or screen printing so as to be thermally treated then.

[0066] A multilayered piezoelectric/electrostrictive ceramic actuator of desired layers is manufactured by repeating the steps of forming piezoelectric/electrostrictive layer and upper electrode by the method.

[0067] If a multilayered piezoelectric/electrostrictive ceramic actuator of n layers is compared with a single layered piezoelectric/electrostrictive ceramic actuator, the multilayer can get operation displacement and speed about n times for same voltage applied and can get same operation displacement and speed as that of single layer only with applied voltage about 1/n time.

[0068] And various vibration shapes can be obtained by differently forming piezoelectric/electrostrictive layer thicknesses so as to differentiate the applied electric field per piezoelectric/electrostrictive layer which shapes are advantageously used to control the liquid drop size or to stabilize meniscus.

[0069] And actuator characteristics can be improved by polarizing the multilayered piezoelectric/electrostrictive layer. Greater displacement than for single piezoelectric/electrostrictive layer or for nonpolarized piezoelectric/electrostrictive layer can be obtained if we variously control piezoelectric/electrostrictive layer polarization direction.

[0070] In case where metal is used for vibration plate, multilayered piezoelectric/electrostrictive ceramic actuator manufactured by the method is comprising of a metal vibration plate; a piezoelectric/electrostrictive layer on the metal vibration plate formed by using a ceramic paste prepared by mixing one part of ultrafine ceramic oxide powder below 5 μm of particle size made by nonexplosive oxidative-reductive combustion reaction at relatively low temperature of 100-500° C. having basic composition elements of lead and titanium and other part of ceramic colloid solution prepared based on water or organic solvent and having same or similar composition with the ultrafine ceramic oxide powder; and an upper electrode formed on the piezoelectric/electrostrictive layer; but multilayer structrue is formed by repetitive alternating heaping of the piezoelectric/electrostrictive layer and upper electrode.

[0071] But in case where ceramic or resious organic compound is used for vibration plate, the actuator is comprising of a vibration plate; a lower electrode formed on the vibration plate; a piezoelectric/electrostrictive layer on the lower electrode formed by using a ceramic paste prepared by mixing one part of ultrafine ceramic oxide powder below 5 μm of particle size made by nonexplosive oxidative-reductive combustion reaction at relatively low temperature of 100-500° C. having basic composition elements of lead and titanium and other part of ceramic colloid solution prepared based on water or organic solvent and having same or similar composition with the ultrafine ceramic oxide powder; and an upper electrode formed on the piezoelectric/electrostrictive layer; but multilayer structrue is formed by repetitive alternating heaping of the piezoelectric/electrostrictive layer and upper electrode.

[0072]FIG. 2 shows piezoelectric/electrostrictive ceramic actuator heaped up five layers by the present invention.

[0073] Actuator as of FIG. 2 is comprising of five layer structure by repetitive alternating heaping of piezoelectric/electrostrictive layer (26 a) (26 b) (26 c) (26 d) (26 e) and upper electrode (28 a) (28 b) (28 c) (28 d) (28 e) on lower electrode (24) formed on vibration plate (22) bonded with chamber plate (20).

[0074] In case where it is heaped up five layers as in FIG. 2, operation displacement and speed about five times can be obtained when same drive voltage is applied while same operation displacement and speed as with single layer can be obtained by some one fifth drive voltage.

[0075] The present invention as above makes effect feasible of high quality image and high speed printing as large displacement and high speed actuating is feasible because it can get great displacement and driving speed even with small variation in driving voltage because of piezoelectric/electrostrictive layer and upper electrode altenatingly heaped to multilayer.

[0076] And cost expended to circuit formation and manufacture can be cut down because the drive voltage needed to actuate piezoelectric/electrostrictive ceramic actuator can be greatly decreased.

[0077] And various deformation shapes can be obtained by electric field strength difference between thin layer and thick layer by differently forming piezoelectric/electrostrictive layer thickness each other which shapes can be advantageously used to control the liquid drop size or to stabilize meniscus.

[0078] And we can get actuator characteristics improved from single piezoelectric/electrostrictive layer or nonpolarized piezoelectric/electrostrictive layer by way of polarizing the piezoelectric/electrostrictive layer formed to multilayer.

[0079] The invention is once again explained in some more detail by the following practical examples. But the following application examples are only illustrations of the invention and do not confine extent of the invention.

EXAMPLE 1

[0080] A part of piezoelectric/electrostrictive fine powder of PZT-PMN series below 0.5 μm in particle size manufactured by nonexplosive oxidative-reductive combustion reaction and other part of PZT-methoxyethanol sol of 0.5 M concentration were mixed in weight ratio 1:1, which were then dispersed in ultrasonic cleaning machine for 30 minutes.

[0081] Suspension obtained was worked of spin coating on silicon substrate plate where platinum had been vapor deposited to lower electrode and was partly dried at ordinary temperature then the piezoelectric/electrostrictive layer partly dried was completely dried at 120° C.

[0082] The completely dried piezoelectric/electrostrictive layer was thermally treated 300° C. whereupon an upper electrode was then vapor deposited.

[0083] The piezoelectric/electrostrictive layer was disposed of coating, drying and heat treatment whereupon again an upper electrode was then vapor deposited to repeat thus for three times to manufacture piezoelectric/electrostrictive ceramic actuator heaped up three layers resultantly.

EXAMPLE 2

[0084] Trimethylene glycol and piezoelectric/electrostrictive fine powder of PZT series below 0.1 μm in particle size manufactured by nonexplosive oxidative-reductive combustion reaction were mixed in weight ratio 4:6, which were then agitated in automatic mortar for 6 hours.

[0085] PZT-acetic acid sol of 2.0 M concentration was mixed with the mixed solution of trimethylene glycol and powder in weight ratio 5:1, which was then agitated in automatic mortar for more 30 minutes and was dispersed in ultrasonic cleaning machine for 30 minutes.

[0086] Suspension obtained was worked of dip coating on stainless steel substrate plate and was partly dried at ordinary temperature then the piezoelectric/electrostrictive layer partly dried was completely dried at 100° C.

[0087] The completely dried piezoelectric/electrostrictive layer was thermally treated 300° C. whereupon an upper electrode was then vapor deposited.

[0088] The piezoelectric/electrostrictive layer was disposed of coating, drying and heat treatment whereupon again an upper electrode was then vapor deposited to repeat thus for five times to manufacture piezoelectric/electrostrictive ceramic actuator heaped up five layers resultantly.

EXAMPLE 3

[0089] A part of piezoelectric/electrostrictive fine powder of PZT series below 0.1 μm in particle size manufactured by nonexplosive oxidative-reductive combustion reaction and other part of PZT-acetic acid sol of 2 M concentration were mixed in weight ratio 7:3. PZT sol obtained by hydrolization by adding a small quantity of water into 2 M PZT-acetic acid sol was added to the mixture in weight ratio of 25% of the fine powder, which was so mixed in automatic mortar. Thence a suitable amount of acetic acid was added to ensure suitable viscosity for spin coating wherefore coating was then carried out on silicon substrate where lower electrode of platinum had been formed.

[0090] The coated piezoelectric/electrostrictive layer was dried after which it was thermally treated 300° C. upon which treated layer an upper electrode was then vapor deposited.

[0091] The piezoelectric/electrostrictive layer was disposed of coating, drying and heat treatment whereupon again an upper electrode was then vapor deposited to repeat thus for ten times to manufacture piezoelectric/electrostrictive ceramic actuator heaped up ten layers resultantly.

EXAMPLE 4

[0092] 2 M PZT-acetic acid sol and piezoelectric/electrostrictive fine powder of PZT-PMN series below 0.5 in particle size manufactured by nonexplosive oxidative-reductive combustion reaction were mixed in weight ratio 3:7. Polyvinyl alcohol was added into the mixture in weight ratio of 10% of the fine powder, which was so mixed in automatic mortar.

[0093] Thence a suitable amount of methoxyethanol was added to ensure suitable viscosity for spin coating wherefore coating was then carried out on silicon substrate where lower electrode of platinum had been formed.

[0094] The coated piezoelectric/electrostrictive layer was dried at 300° C. after which it was thermally treated at 700° C. upon which treated layer an upper electrode was then vapor deposited.

[0095] The piezoelectric/electrostrictive layer was disposed of coating, drying and heat treatment whereupon again an upper electrode was then vapor deposited to repeat thus for ten times to manufacture piezoelectric/electrostrictive ceramic actuator heaped up ten layers resultantly. 

What is claimed is:
 1. A manufacturing method of a multilayered piezoelectric/electrostrictive ceramic actuator by sintering process at low temperature, the method comprising the steps of: providing a metal vibration plate; forming a piezoelectric/electrostrictive layer on the vibration plate using ceramic paste prepared by mixing ultrafine ceramic oxide powder below 5 μm of particle size made by nonexplosive oxidative-reductive combustion reaction at relatively low temperature of 100-500° C., having basic composition elements of lead and titanium, and ceramic sol solution of same or similar composition with said ultrafine ceramic oxide powder, prepared on the base of water or organic solvent; thermally treating said piezoelectric/electrostrictive layer at 100-800° C.; forming an upper electrode on said piezoelectric/electrostrictive layer; and recycling the steps of forming a piezoelectric/electrostrictive layer on the vibration plate, thermally treating the said layer, and forming an upper electrode on said layer, thereby multilayered piezoelectric/electrostrictive layer and upper electrode are formed.
 2. The method in claim 1, wherein said piezoelectric/electrostrictive layer is formed 0.1-10 μm thick.
 3. The method in claim 2, wherein said piezoelectric/electrostrictive layer is formed 0.1-6 μm thick.
 4. The method in claim 1, wherein the thickness of said piezoelectric/electrostrictive layer is not equal each other.
 5. The method in claim 1, wherein said multilayered piezoelectric/electrostrictive layer is polarized.
 6. A manufacturing method of a multilayered piezoelectric/electrostrictive ceramic actuator by sintering process at low temperature, the method comprising the steps of: providing a vibration plate; forming a lower electrode on said vibration plate; forming a piezoelectric/electrostrictive layer on said lower electrode top using ceramic paste prepared by mixing ultrafine ceramic oxide powder below 5 μm of particle size made by nonexplosive oxidative-reductive combustion reaction at relatively low temperature of 100-500° C., having basic composition elements of lead and titanium, and ceramic sol solution of same or similar composition with said ultrafine ceramic oxide powder, prepared on the base of water or organic solvent; thermally treating said piezoelectric/electrostrictive layer at 100-800° C.; forming an upper electrode on said piezoelectric/electrostrictive layer; and recycling the steps of forming a piezoelectric/electrostrictive layer on the vibration plate, thermally treating the said layer, and forming an upper electrode on said layer, thereby multilayered piezoelectric/electrostrictive layer and upper electrode are formed.
 7. The method in claim 6, wherein said vibration plate is made of ceramic.
 8. The method in claim 7, wherein said ceramic is alumina (Al₂O₃), zirconia (ZrO₂), silicon (Si), silicon carbide (SiC), silicon nitride (Si₃N₄), silicon oxide (SiO₂) or glass series.
 9. The method in claim 6, wherein said vibration plate is made of resinous polymeric organic compound.
 10. The method in claim 9, wherein said resinous polymeric organic compound is polyester, polyimide, polyethyleneimide or Teflon series resin.
 11. The method in claim 6, wherein said piezoelectric/electrostrictive layer is formed 0.1-10 μm thick.
 12. The method in claim 11, wherein said piezoelectric/electrostrictive layer is formed 1-6 μm thick.
 13. The method in claim 6, wherein the thickness of said piezoelectric/electrostrictive layer is not equal each other.
 14. The method in claim 6, wherein said multilayered piezoelectric/electrostrictive layer is polarized.
 15. A multilayered piezoelectric/electrostrictive ceramic actuator manufactured by sintering process at low temperature, the actuator comprising: a metal vibration plate; a piezoelectric/electrostrictive layer on said vibration plate using ceramic paste prepared by mixing ultrafine ceramic oxide powder below 5 μm of particle size made by nonexplosive oxidative-reductive combustion reaction at relatively low temperature of 100-500° C., having basic composition elements of lead and titanium, and ceramic sol solution of same or similar composition with said ultrafine ceramic oxide powder, prepared on the base of water or organic solvent; and an upper electrode formed on said piezoelectric/electrostrictive layer, wherein a multilayer structure is formed by forming said piezoelectric/electrostrictive layers and said upper electrodes alternatively each other.
 16. The actuator in claim 15, wherein the thickness of said piezoelectric/electrostrictive layer thickness is 0.1-10 μm.
 17. The actuator in claim 16, wherein the thickness of said piezoelectric/electrostrictive layer is 1-6 μm.
 18. The actuator in claim 15, wherein the thickness of said piezoelectric/electrostrictive layer is not equal each other.
 19. The actuator in claim 15, wherein said multilayered piezoelectric/electrostrictive layer is polarized.
 20. A multilayered piezoelectric/electrostrictive ceramic actuator manufactured by sintering process at low temperature, the actuator comprising: a vibration plate; a lower electrode formed on said vibration plate; a piezoelectric/electrostrictive layer on said lower electrode using ceramic paste prepared by mixing ultrafine ceramic oxide powder below 5 μm of particle size made by nonexplosive oxidative-reductive combustion reaction at relatively low temperature of 100-500° C., having basic composition elements of lead and titanium, and ceramic sol solution of same or similar composition with said ultrafine ceramic oxide powder, prepared on the base of water or organic solvent; and an upper electrode formed on said piezoelectric/electrostrictive layer, wherein a multilayer structure is formed by forming said piezoelectric/electrostrictive layers and said upper electrodes alternatively each other.
 21. The actuator in claim 20, wherein said vibration plate is made of ceramic.
 22. The actuator in claim 21, wherein said ceramic is alumina (Al₂O₃), zirconia (ZrO₂), silicon (Si), silicon carbide (SiC), silicon nitride (Si₃N₄), silicon oxide (SiO₂) or glass series.
 23. The actuator in claim 20, wherein said vibration plate is made of resinous polymeric organic compound.
 24. The actuator in claim 23, wherein said resinous polymeric organic compound is polyester, polyimide, polyethyleneimide or Teflon series resin.
 25. The actuator in claim 20, wherein said piezoelectric/electrostrictive layer is formed 0.1-10 μm thick.
 26. The actuator in claim 25, wherein said piezoelectric/electrostrictive layer is formed 1-6 μm thick.
 27. The actuator in claim 20, wherein the thickness of said piezoelectric/electrostrictive layer is not equal each other.
 28. The actuator in claim 20, wherein said multilayered piezoelectric/electrostrictive layer is polarized. 